000 00299nam a2200109Ia 4500
008 230222s9999 xx 000 0 und d
100 _aStephen Campbell
245 4 _aThe Science and Engineering of Microelectronic Fabrication
250 _a2
260 _bOxford University Press
_c2005
942 _cBK
999 _c10782
_d10782