000 00327nam a2200121Ia 4500
008 230222s9999 xx 000 0 und d
082 _a621.38173
100 _aStephen A Campbell
245 4 _aThe Science and Engineering of Microelectronic Fabrication
250 _a2
260 _bOxford University Press
_c2008
942 _cBK
999 _c12442
_d12442