000 00298nam a2200121Ia 4500
008 230222s9999 xx 000 0 und d
082 _a621.38173
100 _aStephen D Senturia
245 0 _aMicrosystem Design
250 _a1
260 _bSpringer (India) Pvt Ltd,New Delhi
_c2010
942 _cBK
999 _c18472
_d18472