000 00307nam a2200121Ia 4500
008 230222s9999 xx 000 0 und d
082 _a621.3813
100 _aJulian W Gardner
245 0 _aMicrosensors MEMS and Smart Devices
250 _a1
260 _bWiley India Pvt Ltd,New Delhi
_c2013
942 _cBK
999 _c24103
_d24103