000 00291nam a2200121Ia 4500
008 230222s9999 xx 000 0 und d
082 _a621.3813
100 _aChang Liu
245 0 _aFoundations of MEMS 2nd Ed.
250 _a2
260 _bPearson Education, New Delhi
_c2018
942 _cBK
999 _c35741
_d35741