000 00315nam a2200121Ia 4500
008 230222s9999 xx 000 0 und d
082 _a621.3813
100 _aTai Ran Hsu
245 0 _aMEMS and Microsystems; Design and Manufacture
250 _a1
260 _bMcgraw Hill Education, New Delhi
_c2017
942 _cBK
999 _c35762
_d35762